Research Article
Effect of the Change of Deposition Time on the Secondary Direction and Abnormal Shape of Grains Growth of SnO2 Thin Films
Table 1
Deposition conditions for SnO2 thin films.
| | Sample | Deposition time (min) | Deposition temperature (°C ) | Gas flow rate
Ar: O (sccm) |
| | 420-5 | 5 | 420 | 10 : 10 | | 420-10 | 10 | 420 | 10 : 10 | | 420-20 | 20 | 420 | 10 : 10 | | 420-30 | 30 | 420 | 10 : 10 |
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