Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS

Figure 1

SEM images of an electrostatic MEMS switch: (a) an assembled device without hermetic housing, (b) movable cover (1) and fixed base (2). In the panel (b) the movable part was bent back prior to analysis; numbers (3) and (4) are marked contacts on the fixed and movable parts, respectively.

(a)

(b)