Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS

Figure 6

SEM image (×1100) and EDX analysis of an ashless filter used for the filtration of Rh electrolyte. The elemental composition (wt.%) in point (1) is S 45.8, Ca 34.4, Rh 10.5, Na 4.2, K 3.5, and Ti 1.6, and in point (2)-Ti 63.9, S 21.3, Rh 6.3, Na 3.6, P 1.7, Al 1.6, and K 1.6.