Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS

Figure 7

XPS mappings of the fixed base of DS switch: (a) Au 4f (XPS survey spectra were collected in marked points P1–P3 and P5), (b) Au 4f (green color) and Rh 3d (red color), and (c) Cu 2p.

(a)

(b)

(c)