Structural and X-Ray Photoelectron Spectroscopy Study of Al-Doped Zinc-Oxide Thin Films

Table 1

Deposition conditions for the Al-doped ZnO thin film samples.

Sample	Deposition time (hr)	Deposition temperature (°C)	Gas flow rate	Power (W)
			N : O (sccm)
A450-7	3	450	7 : 7	90
A350-7	3	350	7 : 7	90
A350-14	3	350	14 : 14	90
A350-21	3	350	21 : 21	90