Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films

<div>Load-indentation depth curves for the 3.0 <i>μ</i>m Cu films annealed at different temperatures.</div>

Advances in Materials Science and Engineering

Figure 8: Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films 