Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films

Table 1

Surface roughness Sq (nm) for the Cu films with different thicknesses annealing temperatures.

Annealing temperature (°C)	Thickness (μm)
	1.0	1.6	3.0
As-deposited	3.88	3.4	2.98
300	3.66	3.09	2.61
400	1.63	2.91	2.16
500	2.88	4.08	9.48