| Research | LN | Configuration details (region) | LW |
| O’Connell and Thompson 1995 [6] | 3 | npbf, , | Equal | Nie et al. 2004 [7] | 3 | control (npbf, mass flow), , | Equal | Zhou et al. 2014 [27] | 3 | control (npbf, mass flow, ), buffer, | Equal | Cosden and Lukes 2013 [18] | 4 | mass flow, , buffer, | Equal | Sun et al. 2010 [19] | 4 | depress (extending to the continuum region, npbf), , buffer, | Equal | Yen et al. 2007 [8] | 5 | depress (extending to the continuum region, npbf), buffer, , buffer, | Equal | Ko et al. 2010 [14] | 5 | control (npbf, mass flow), buffer, , buffer, | Equal |
|
|