Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering

<div>Plasmonic optical absorption spectra (300 K) of the ZrO2(Y)/Au/ZrO2(Y)/SiO2 and GeO2/Au/GeO2/SiO2 stacks after annealing at 450°C for 1 hr. The optical absorption spectra were calculated from the respective optical transmission ones presented in Figures <a href="../fig2/#a">2(a)</a> and <a href="../fig2/#c">2(c)</a>.</div>

Advances in Materials Science and Engineering

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Figure 3

Figure 3: Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering