Research Article

Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering

Table 1

The average diameter , the surface density , the volume fraction , and the array density parameter for the Au NPs in the ZrO2(Y), HfO2(Y), and GeO2 based nanocomposite films fabricated by Magnetron Sputtering followed by annealing. Uncertainty assessment for all parameters is 15%.

, nmFilm material, nm, cm–2

0.52 minZrO2 (12 mol.% Y2O3) [15]1.14.7 10120.00280.23
ZrO2 (8 mol.% Y2O3)
HfO2 (12 mol.% Y2O3)
HfO2 (0 mol.% Y2O3)
GeO2

0.51 hrZrO2 (12 mol.% Y2O3) [15]1.21.1 10130.00970.40
ZrO2 (8 mol.% Y2O3)
ZrO21.92.8 10120.01060.27
HfO2 (12 mol.% Y2O3)
HfO2 (0 mol.% Y2O3)1.93.0 10120.01080.28
GeO21.82.3 10120.00650.23

0.52 hrsZrO2 (12 mol.% Y2O3) [15]0.723.4 10130.00680.42

1.02 minZrO2 (12 mol.% Y2O3) [15]1.94.0 10120.01510.38
ZrO2 (8 mol.% Y2O3)2.71.2 10120.01150.29
HfO2 (12 mol.% Y2O3)
HfO2 (0 mol.% Y2O3)2.12.9 10120.01470.30
GeO2

1.01 hrZrO2 (12 mol.% Y2O3) [15]1.65.0 10120.02810.36
ZrO2 (8 mol.% Y2O3)2.61.6 10120.01470.31
ZrO23.01.4 10120.01800.34
HfO2 (12 mol.% Y2O3)2.22.5 10120.02050.30
HfO2 (0 mol.% Y2O3)3.66.8 10110.01640.32
GeO21.56.0 10120.01030.27

1.02 hrsZrO2 (12 mol.% Y2O3) [15]1.78.6 10120.02230.50

2.02 minZrO2 (12 mol.% Y2O3) [15]1.98.3 10120.02740.54
ZrO2 (8 mol.% Y2O3)2.46.3 10120.04820.44
HfO2 (12 mol.% Y2O3)2.27.6 10120.04210.43
HfO2 (0 mol.% Y2O3)3.51.9 10120.04040.43
GeO22.09.1 10120.04100.42

2.01 hrZrO2 (12 mol.% Y2O3) [15]1.81.1 10130.03460.60
ZrO2 (8 mol.% Y2O3)2.63.7 10120.03700.40
ZrO23.41.2 10120.02300.36
HfO2 (12 mol.% Y2O3)3.22.8 10120.05760.45
HfO2 (0 mol.% Y2O3)3.42.4 10120.05280.45
GeO22.24.4 10120.04880.36

2.02 hrsZrO2 (12 mol.% Y2O3) [15]1.97.9 10120.02840.53