Advances in Materials Science and Engineering / 2017 / Article / Tab 1 / Research Article
Fabrication of Metal Nanoparticle Arrays in the ZrO2 (Y), HfO2 (Y), and GeOx Films by Magnetron Sputtering Table 1 The average diameter
, the surface density
, the volume fraction
, and the array density parameter
for the Au NPs in the ZrO
2 (Y), HfO
2 (Y), and GeO
2 based nanocomposite films fabricated by Magnetron Sputtering followed by annealing. Uncertainty assessment for all parameters is
15%.
, nmFilm material , nm , cm–2 0.5 2 min ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.1 4.7 1012 0.0028 0.23 ZrO2 (8 mol.% Y2 O3 ) — — — — HfO2 (12 mol.% Y2 O3 ) — — — — HfO2 (0 mol.% Y2 O3 ) — — — — GeO2 — — — — 0.5 1 hr ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.2 1.1 1013 0.0097 0.40 ZrO2 (8 mol.% Y2 O3 ) — — — — ZrO2 1.9 2.8 1012 0.0106 0.27 HfO2 (12 mol.% Y2 O3 ) — — — — HfO2 (0 mol.% Y2 O3 ) 1.9 3.0 1012 0.0108 0.28 GeO2 1.8 2.3 1012 0.0065 0.23 0.5 2 hrs ZrO2 (12 mol.% Y2 O3 ) [15 ] 0.72 3.4 1013 0.0068 0.42 1.0 2 min ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.9 4.0 1012 0.0151 0.38 ZrO2 (8 mol.% Y2 O3 ) 2.7 1.2 1012 0.0115 0.29 HfO2 (12 mol.% Y2 O3 ) — — — — HfO2 (0 mol.% Y2 O3 ) 2.1 2.9 1012 0.0147 0.30 GeO2 — — — — 1.0 1 hr ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.6 5.0 1012 0.0281 0.36 ZrO2 (8 mol.% Y2 O3 ) 2.6 1.6 1012 0.0147 0.31 ZrO2 3.0 1.4 1012 0.0180 0.34 HfO2 (12 mol.% Y2 O3 ) 2.2 2.5 1012 0.0205 0.30 HfO2 (0 mol.% Y2 O3 ) 3.6 6.8 1011 0.0164 0.32 GeO2 1.5 6.0 1012 0.0103 0.27 1.0 2 hrs ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.7 8.6 1012 0.0223 0.50 2.0 2 min ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.9 8.3 1012 0.0274 0.54 ZrO2 (8 mol.% Y2 O3 ) 2.4 6.3 1012 0.0482 0.44 HfO2 (12 mol.% Y2 O3 ) 2.2 7.6 1012 0.0421 0.43 HfO2 (0 mol.% Y2 O3 ) 3.5 1.9 1012 0.0404 0.43 GeO2 2.0 9.1 1012 0.0410 0.42 2.0 1 hr ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.8 1.1 1013 0.0346 0.60 ZrO2 (8 mol.% Y2 O3 ) 2.6 3.7 1012 0.0370 0.40 ZrO2 3.4 1.2 1012 0.0230 0.36 HfO2 (12 mol.% Y2 O3 ) 3.2 2.8 1012 0.0576 0.45 HfO2 (0 mol.% Y2 O3 ) 3.4 2.4 1012 0.0528 0.45 GeO2 2.2 4.4 1012 0.0488 0.36 2.0 2 hrs ZrO2 (12 mol.% Y2 O3 ) [15 ] 1.9 7.9 1012 0.0284 0.53