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Advances in Materials Science and Engineering

Advances in Materials Science and Engineering / 2017 / Article / Tab 1

Research Article

Influence of Elements on the Corrosion Resistance of DLC Films

Table 1

Deposition of pure DLC, Si-DLC, and Si-N-DLC films.
Film typeGaseous mixtureBias voltage (kV)RF power (W)Deposition pressure (Pa)Gas flow rate ratioActual gas flow (sccm)
Pure DLCC2H23002—18
Si-DLCC2H2 : TMS30022 : 111.4 : 5.7
1 : 43.7 : 14.8
Si-N-DLCC2H2 : TMS : N23002-314 : 1 : 114 : 1 : 1
14 : 1 : 214 : 1 : 2
14 : 1 : 314 : 1 : 3

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