Research Article
Influence of Elements on the Corrosion Resistance of DLC Films
Table 4
Electrochemical parameters of all films.
| | Film type | Gas flow rate ratio | Corrosion potential ( (V)) | Corrosion current density ( (A/cm2)) |
| | Pure DLC | — | | |
| | Si-DLC | 2 : 1 | 0.44 | | | 1 : 4 | 0.61 | |
| | Si-N-DLC | 14 : 1 : 1 | 0.85 | | | 14 : 1 : 2 | 0.74 | | | 14 : 1 : 3 | 0.74 | |
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