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Advances in Materials Science and Engineering
Volume 2017, Article ID 4850908, 18 pages
https://doi.org/10.1155/2017/4850908
Research Article

Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

1Department of Physical Metallurgy and Materials Technology, Brandenburg University of Technology (BTU) Cottbus-Senftenberg, Konrad-Wachsmann-Allee 17, 03046 Cottbus, Germany
2Bühler Leybold Optics GmbH, Siemens Straße 88, 63755 Alzenau, Germany

Correspondence should be addressed to Stefanie Severin; ed.ut-b@etsreves

Received 23 June 2017; Revised 20 September 2017; Accepted 3 October 2017; Published 14 November 2017

Academic Editor: David Holec

Copyright © 2017 Stefanie Severin et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Stefanie Severin, Muhammad Naveed, and Sabine Weiß, “Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties,” Advances in Materials Science and Engineering, vol. 2017, Article ID 4850908, 18 pages, 2017. https://doi.org/10.1155/2017/4850908.