Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Figure 14

AFM image of the AlTiN coating surface deposited at 100 Hz for a scanned area of 10 × 10 μm with a maximal structure height of 236 nm and a maximal structure depth of −60 nm. Both SEM images (a) and (b) illustrate the surface structure in the nanometre range as examples for the marked surface areas in different resolutions.