Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Figure 15

AFM image of the AlTiN coating surface deposited at 300 Hz for a scanned area of 10 × 10 μm with a maximal structure height of 140 nm and a maximal structure depth of −13 nm. The SEM image on the left side illustrates the surface structure in the nanometre range as an example for the marked surface area.