Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Figure 3

Deposition rate of the AlTiN coatings depending on pulse-frequency (a) and on the resulting peak current density (b) at different pulse-frequencies in the range of 100–500 Hz with a constant pulse length of 50 μs and deposition time of 30 minutes.

(a)

(b)