Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

<div>Elemental composition of AlTiN coatings by HPPMS with various pulse-frequency in the range of 100–500 Hz.</div>

Advances in Materials Science and Engineering

Figure 4: Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties 