Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td class="align_left" rowspan="2">Pulse frequency</td><td class="align_center" colspan="3">Elemental composition [at. %]</td><td class="align_center">Stoichiometry</td></tr><tr class="thead"><td class="align_center">Al</td><td class="align_center">Ti</td><td class="align_center">N </td><td class="align_center"> <svg height="11.5564pt" id="M17" style="vertical-align:-2.26807pt" version="1.1" viewbox="-0.0498162 -9.28833 83.5854 11.5564" width="83.5854pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M536 404C536 423 520 448 491 448C445 448 398 404 308 283L286 338C255 416 242 448 217 448C182 448 138 402 92 341L111 321C149 368 169 378 178 378C188 378 198 363 214 320L254 212C185 117 138 65 107 65C98 65 85 69 82 75C79 82 73 86 65 86C44 86 23 60 23 39C23 7 44 -12 71 -12C119 -12 168 33 265 177L306 61C321 17 347 -12 373 -12C413 -12 465 33 507 96L491 119C459 84 432 60 413 60C395 60 378 92 358 148L321 250C341 279 369 310 389 332C417 363 439 382 456 382C466 382 475 376 481 368C486 361 492 358 496 358C513 358 536 381 536 404Z" id="g113-121"></path></g><g transform="matrix(.013,0,0,-0.013,10.899,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z" id="g117-34"></path></g><g transform="matrix(.013,0,0,-0.013,22.162,0)"><path d="M719 650H483V622C553 619 576 606 581 560C585 532 588 487 588 394V148H585L167 650H20V622C67 618 88 610 109 585C127 562 129 557 129 484V264C129 173 126 124 123 93C118 44 92 31 35 28V0H272V28C204 32 181 44 176 95C173 124 170 172 170 264V515H172L598 -9H629V394C629 487 631 532 635 563C639 606 663 619 719 622V650Z" id="g121-76"></path></g><g transform="matrix(.013,0,0,-0.013,31.821,0)"><path d="M368 703H309L44 -163H104L368 703Z" id="g113-48"></path></g><g transform="matrix(.013,0,0,-0.013,37.182,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path></g><g transform="matrix(.013,0,0,-0.013,41.68,0)"><path d="M673 0V28C608 34 594 43 563 129C499 303 432 494 370 665L339 656L132 132C98 43 84 37 20 28V0H238V28C162 35 154 45 175 108C188 150 203 192 219 237H432C454 176 474 122 487 83S491 36 428 28V0H673ZM418 280H234C265 362 296 450 328 535H330L418 280Z" id="g121-63"></path></g><g transform="matrix(.013,0,0,-0.013,50.702,0)"><path d="M238 0V26C174 32 166 38 166 104V712C132 700 70 683 18 677V653C81 647 87 645 87 577V104C87 38 78 32 15 26V0H238Z" id="g121-106"></path></g><g transform="matrix(.013,0,0,-0.013,56.897,0)"><path d="M535 230V280H323V490H265V280H52V230H265V-3H323V230H535Z" id="g117-36"></path></g><g transform="matrix(.013,0,0,-0.013,67.433,0)"><path d="M592 498C586 556 582 629 581 675H560C545 656 537 650 510 650H115C87 650 74 652 60 675H40C38 620 33 555 28 495H57C69 539 77 568 89 585C102 607 122 616 205 616H267V123C267 44 259 34 168 28V0H454V28C360 34 352 44 352 123V616H422C498 616 514 608 531 584C542 568 552 543 562 495L592 498Z" id="g121-82"></path></g><g transform="matrix(.013,0,0,-0.013,75.246,0)"><path d="M135 536C164 536 186 560 186 587C186 617 164 639 136 639C109 639 85 617 85 587C85 560 109 536 135 536ZM252 0V26C188 32 181 38 181 106V451C138 433 90 420 39 412V388C99 379 102 374 102 312V106C102 38 95 32 32 26V0H252Z" id="g121-103"></path></g><g transform="matrix(.013,0,0,-0.013,78.73,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path></g></svg></td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td class="align_left">100 Hz</td><td class="align_center">19.49</td><td class="align_center">23.98</td><td class="align_center">56.22</td><td class="align_center">1.293</td></tr><tr><td class="align_left">200 Hz</td><td class="align_center">23.65</td><td class="align_center">23.73</td><td class="align_center">52.05</td><td class="align_center">1.099</td></tr><tr><td class="align_left">300 Hz</td><td class="align_center">34.18</td><td class="align_center">27.99</td><td class="align_center">37.11</td><td class="align_center">0.597</td></tr><tr><td class="align_left">400 Hz</td><td class="align_center">34.64</td><td class="align_center">26.73</td><td class="align_center">37.80</td><td class="align_center">0.616</td></tr><tr><td class="align_left">500 Hz</td><td class="align_center">39.29</td><td class="align_center">24.96</td><td class="align_center">34.70</td><td class="align_center">0.540</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Elemental composition and stoichiometry of the (Al,Ti)N coatings at different pulse frequencies.

Advances in Materials Science and Engineering

tab2

Table 2

Table 2: Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties 