Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Table 4

Mechanical properties of the (Al,Ti)N coatings at different pulse frequencies.

Pulse frequency	Mechanical properties [GPa]			Ratio of hardness and elastic moduli			Elastic recovery
	H	E	with				[%]
100 Hz	44.8	320.3	333.6	0.14	0.13	0.88	54.4%
200 Hz	49.5	352.1	366.7	0.14	0.13	0.98	56.0%
300 Hz	58.0	322.4	335.8	0.18	0.17	1.88	59.3%
400 Hz	48.1	286.1	298.0	0.17	0.16	1.36	56.1%
500 Hz	51.9	365.7	380.9	0.14	0.14	1.05	59.3%