Effect of Argon-Oxygen Mixing Gas during Magnetron Sputtering on TiO₂ Coatings

Table 2

Grain size of rutile with (111) orientation at different O₂ flow rate.

O2 (%)	Pos. (2θ)	FWHM (°)	(nm)
30	40.14	0.091	16.2
20	40.14	0.120	12.3
10	40.10	0.112	13.2
5	40.10	0.221	6.7