Research Article
The Effect of Stress in the Density of States of Amorphous Carbon Films Determined by X-Ray Excited Auger Electron Spectroscopy
Figure 2
(a) XAES KVV spectra of carbon films. The background was subtracted out using the Shirley Model [16]. The very intense peak at approximately 240.5 eV is due to excitation of C 1s core by the Kα of O adsorbed on the anode of the X-ray tube and is used as reference. The vertical lines are only guide for the eyes used to emphasize the energy shift of the 1s centroid from the C 1s core level used as constant energy reference. (b) XPS spectra showing the binding energy of the C1s core level excited by the Kα of Al and the contributions of sp2 and sp3 hybrid states. (c) First derivative spectra of the XAES KVV showing the parameter estimated as 22 eV.
| (a) |
| (b) |
| (c) |