Research Article
A Study of Polishing Feature of Ultrasonic-Assisted Vibration Method in Bamboo Charcoal
Table 1
The constant parameters of UV polishing.
| | Parameters | Description |
| | Polishing tools (mm) | Bamboo charcoal (8 8 20) | | Specimen | Silicon wafer | | Particle Grain Size (μm) | Diamond powder 2–4 | | Solution | Pure Water | | Platen speed (rpm) | 40 | | Vibration amplitude (μm) | 5 |
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