Research Article

Apparatus Developments of Ultrasonic Vibration-Assisted Microabrasive Waterjet Polishing

Table 3

The main technical indexes.

Working frequency (Hz)Impedance accuracyQm accuracyImpedance accuracy (MΩ)Measured time (ms)Impedance parameter

4e1 – 1.10e8±0.08%±3%3–5003Z, Y, θ, R, X, G, B, L, C, D, Q