Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition

Table 1

Thicknesses and MSE of InSb thin film samples from SE.

Sample no.	S1	S2	S3	S4	S5
V/III ratio	3.91	3.98	4.20	4.78	5.38
Layer thickness (nm)	56.4	63.5	52.0	34.3	51.4
MSE	7.20	6.14	4.58	5.90	3.82