Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition

Table 2

The fitting and calculation results from XRD of five InSb samples with different V/III ratios.

Sample no.	S1 (376)	S2 (380)	S3 (373)	S4 (370)	S5 (371)
V/III ratio	3.91	3.98	4.2	4.78	5.38
XRD FWHM (, degree)	0.21	0.07	0.05	0.11	0.1
Peak position (, degree)	56.95	56.92	56.92	56.96	56.96
Layer thickness (nm) (SE measured)	56.4	63.5	52.0	34.3	51.4
Calculated (, degree)	0.29	0.26	0.32	0.48	0.32