Synchrotron Radiation X-Ray Absorption Spectroscopy and Spectroscopic Ellipsometry Studies of InSb Thin Films on GaAs Grown by Metalorganic Chemical Vapor Deposition

Table 3

The fitting results of the EXAFS data for first coordination shell atom around In atom.

Sample no.	V/III ratio	Amp	CN	(Å)	R-factor
S1	3.91	0.9500 (0)	3.80	2.8027 (9)	0.0052 (5)
S2	3.98	0.9805 (6)	3.92	2.8044 (9)	0.0050 (9)
S3	4.20	0.9807 (3)	3.92	2.8000 (7)	0.0089 (1)
S4	4.78	0.9950 (0)	3.98	2.8014 (3)	0.0078 (5)
S5	5.38	0.9898 (6)	3.96	2.7989 (9)	0.0055 (2)