Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides

<div>SEM images of ablated depth at (a) 250x and (b) 650x magnifications (sample number 61: number of shots = 45, fluence = 0.1 J/cm<sup>2</sup>, scanning speed = 3.3 mm/min, and pulse repetition rate = 25 Hz). Measured maximum and mean depths are 1.002 <i>μ</i>m and 0.740 <i>μ</i>m, respectively.</div>

Advances in Materials Science and Engineering

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Figure 5

Figure 5: Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides 