Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides

Figure 7

Membership function diagrams based on generalized bell for all inputs: (a) number of shots, (b) fluence, (c) scanning speed, (d) pulse repetition rate, and (e) number of passes.

(a)

(b)

(c)

(d)

(e)