Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides

Table 1

Experimental layout and results.

Experiment	Processing parameter					Response
	Number of shots	Fluence (J/cm^2)	Scanning speed (mm/min)	Pulse repetition rate (Hz)	Number of passes	Maximum depth (μm)/1 shot	Mean depth (μm)/1 shot
1	1	0.086	120	20	1	0.799	0.678
2	2	0.086	60	20	1	1.86	1.65
3	3	0.086	40	20	1	2.79	2.49
4	4	0.086	30	20	1	3.53	3.12
5	5	0.086	24	20	1	4.56	4.04
6	6	0.086	20	20	1	5.73	5.15
7	7	0.086	17.1	20	1	6.30	5.53
8	8	0.086	15	20	1	7.08	6.2
9	9	0.086	13.3	20	1	7.59	6.61
10	10	0.086	12	20	1	8.81	7.63
11	12	0.086	10	20	1	9.75	8.5
12	14	0.086	8.57	20	1	12.0	10.4
13	16	0.086	7.5	20	1	13.1	11.4
14	18	0.086	6.67	20	1	14.9	13.1
15	20	0.086	6	20	1	16.6	14.5
16	22	0.086	5.45	20	1	19.3	17
17	24	0.086	5	20	1	20.0	17.5
18	26	0.086	4.62	20	1	21.8	18.9
19	28	0.086	4.29	20	1	22.9	20.2
20	30	0.086	4	20	1	24.2	21
21	10	0.03	6	10	1	0.252	0.173
22	10	0.058	6	10	1	0.516	0.425
23	10	0.086	6	10	1	0.797	0.695
24	10	0.113	6	10	1	1.11	0.988
25	10	0.141	6	10	1	1.46	1.35
26	10	0.169	6	10	1	1.79	1.66
27	10	0.197	6	10	1	1.96	1.82
28	10	0.224	6	10	1	2.19	2.04
29	10	0.252	6	10	1	2.3	2.17
30	10	0.28	6	10	1	2.5	2.36
31	1	0.086	120	20	3	2.79	2.43
32	1	0.086	120	20	4	3.9	3.1
33	1	0.086	120	20	5	4.1	3.42
34	1	0.086	120	20	9	8.6	7.58
35	1	0.086	120	20	10	10.0	8.47
36	1	0.086	72	12	1	1.07	0.967