Structural, Optical, and Electrical Characterization of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> Thin Films Grown by Plasma-Assisted Molecular Beam Epitaxy Suitable for UV Sensing

<div>High-resolution rocking curves corresponding to &lt;−402&gt; plane of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> of films grown at 650, 700, and 750°C at fluxes of 1.0 and 1.5 sccm.</div>

Advances in Materials Science and Engineering

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Figure 4

Figure 4: Structural, Optical, and Electrical Characterization of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> Thin Films Grown by Plasma-Assisted Molecular Beam Epitaxy Suitable for UV Sensing 

Figure 4 | Structural, Optical, and Electrical Characterization of β-Ga2O3 Thin Films Grown by Plasma-Assisted Molecular Beam Epitaxy Suitable for UV Sensing 