High Reliability and Fast-Speed Phase-Change Memory Based on Sb₇₀Se₃₀/SiO₂ Multilayer Thin Films

Figure 5

AFM topographic images: (a) SbSe; (b) annealed SbSe; (c) SbSe (1 nm)/SiO (9 nm); (d) annealed SbSe (1 nm)/SiO (9 nm).

(a)

(b)

(c)

(d)