Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel

Table 3

Surface roughness and hardness of coated material.

Coating type	Temperature (°C)	Hardness (GPa)	Surface rougnness (Ra), nm	Root mean square (Rq), nm	Smooth Coefficient (Rku)	Sel. frequency (Hz)	Amplitude, nm	Scan rate (Hz)
TiZrN	200 (S1)	314	3.222	4.057	3.226	287.523	30.9	0.5
	400 (S2)	272.3	2.951	3.742	3.459
TaZrN	200 (S1)	371.3	2.341	3.126	5.319
	400 (S2)	286	2.359	3.186	6.040

Bold values indicate that AFM was used to examine the surface roughness and hardness of two materials. The frequency, amplitude, and scan rate were all kept at the same value.