Research Article
Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam
Table 1
All aperture settings used in this experiment.
| | Voltage (kV) | Xe+ current (nA) | N+ current (nA) | Ar+ current (nA) | O+ current (nA) | Ga+ current (nA) |
| | 30 | 15 | 23 | 7.6 | 5.6 | 21 | | 12 | 20 | 6.9 | 14 | 13 | 18 | | 5 | 20 | 14 | 19 | 24 | 13 | | 2 | 12 | 15 | 3.1 | 3.8 | 7 |
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