Active and Passive Electronic Components

Active and Passive Electronic Components / 1976 / Article

Open Access

Volume 2 |Article ID 283847 | https://doi.org/10.1155/APEC.2.223

J. Launey, A. Tosser, "Couches Conductrices et Transparentes Obtenues par Pulverisation d'une Cible de SnO2", Active and Passive Electronic Components, vol. 2, Article ID 283847, 9 pages, 1976. https://doi.org/10.1155/APEC.2.223

Couches Conductrices et Transparentes Obtenues par Pulverisation d'une Cible de SnO2

Received12 May 1975

Abstract

SnO2 is reactively r.f. sputtered to obtain conductive thin films of good optical transmission. Data about thermal ageing in vacuum, thermal evolution of conductivity, spontaneous ageing in air and optical transmission show how it is possible to obtain a transmission of 80% in visible light with resistance square below 1 kΩ/sq; the possibility of a multiple-step process of sputtering is presented. A “nucleation-growth” model allows an explanation of the observed phenomena.La pulvérisation haute-fréquence d'une cible de SnO2 en présence d'argon et d'oxygène permet d'obtenir des couches minces conductrices de bonne transparence optique. A partir des phénomènes de recuit sous vide, d'évolution de la résistance avec la température, du vieillissement spontané à l'air et de la variation de la transparence optique, il est possible de déterminer la méthode permettant d'obtenir un facteur de transmission de 80% en lumière visible et une résistance carrée inférieure à 1 kΩ/sq; l'intérêt d'une pulvérisation fractionnée est explicité. Le modèle de “germination-croissance” permet une description convenable des phénomènes observés.

Copyright © 1976 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


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