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ElectroComponent Science and Technology
Volume 4 (1977), Issue 3-4, Pages 179-183

Comparison of Arc Erosive and Laser Beam Trimming of Thin Film Resistors

Department of Electronics Technology, Technical University of Budapest, Budapest H-1521, Hungary

Received 10 June 1977

Copyright © 1977 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The physical processes of arc erosive micromachining and the influence of trimming on the parameters of resistors have been examined, and thin film resistors without trimming are compared with those trimmed by arc erosion and laser beam machining.

In the paper a theoretical model for arc erosion of thin films is proposed. The optimal conditions of arc erosive trimming are determined. The shape of the cuts are recorded and examined. The applicability of arc erosive trimming with respect to stability is proved. A measuring method is introduced for resistors trimmed by arc erosion using a direct current generator.