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ElectroComponent Science and Technology
Volume 6 (1980), Issue 3-4, Pages 193-197

New Thick Film Sensors

Microelectronics Laboratory, Department of Electrical Engineering, University of Oulu, Box 191, Oulu 10 SF-90101, Finland

Received 5 May 1979

Copyright © 1980 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Various thick film sensors which are under development in the Microelectronics laboratory of the University of Oulu are described. More details are included on the capacitive thick film temperature sensor which is in the application stage. Other thick film sensors at present in the material development stage are the resistive humidity sensor, the gas sensor and the ion selective sensor.