Active and Passive Electronic Components

Active and Passive Electronic Components / 1981 / Article
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International Microelectronics Conference. Part II

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Volume 8 |Article ID 176098 |

Vladimír Ryšanek, "The Anomalous Properties of Polysiloxane Films", Active and Passive Electronic Components, vol. 8, Article ID 176098, 3 pages, 1981.

The Anomalous Properties of Polysiloxane Films


An electron beam was used to create thin polysiloxane films from methylphenylsiloxane and the anomalous properties of permittivity and temperature dependence, the resistivity dependence on humidity and the permittivity dependence on pressure of air or argon, was examined. These anomalous properties can be potentially applicable to humidity probes, pressure gauges and for miniature capacitors.

Copyright © 1981 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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