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ElectroComponent Science and Technology
Volume 8, Issue 3-4, Pages 247-247
Short Communication

A Theory of Bubbles in Ion-implanted Structures

Department of Electrical Engineering and Industrial Applications of Microelectronics Centre, University of Manitoba, Manitoba, Winnipeg R3T 2N2, Canada

Copyright © 1981 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


This article has no abstract.