Evaporation Characteristics of Electron Beam Gun Heated Sources
Received20 Apr 1983
Accepted06 Jul 1983
Exact expressions for the thickness profile of thin films deposited using electron beam gun heated sources are obtained in terms of the source-substrate geometry. Calculations based on conical and cylindrical indentations show the latter to be more realistic. Self-masking effects at the source are taken into account.
Copyright © 1984 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.