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ElectroComponent Science and Technology
Volume 11 (1984), Issue 2, Pages 175-183

Evaporation Characteristics of Electron Beam Gun Heated Sources

Department of Nuclear Physics, University of Madras, A.C. College Campus, Madras 600 025, India

Received 20 April 1983; Accepted 6 July 1983

Copyright © 1984 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Exact expressions for the thickness profile of thin films deposited using electron beam gun heated sources are obtained in terms of the source-substrate geometry. Calculations based on conical and cylindrical indentations show the latter to be more realistic. Self-masking effects at the source are taken into account.