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Active and Passive Electronic Components
Volume 13, Issue 3, Pages 161-173

Thermoresistive Thin Film Flow Sensor

Institute of Electron Technology Technical University of Wroclaw, Janiszewskiego 11/17, Wroclaw 50-372, Poland

Received 21 April 1988; Accepted 18 May 1988

Copyright © 1989 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Some technological aspects and basic parameters of nickel thin film gas flow sensors are presented. Thermal conditions of sensors are described by the mechanisms of heat transfer. Typical characteristics measured during the sensor operation are given.