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Active and Passive Electronic Components
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Active and Passive Electronic Components
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2012
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Article
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Fig 13
/
Research Article
Comprehension of Postmetallization Annealed MOCVD-
on
Treated III-V Semiconductors
Figure 13
(a) Dielectric constant and (b) effective oxide charges of TiO
2
/S-GaAs and PMA-TiO
2
/S-GaAs at different PMA temperatures.
(a)
(b)