Research Article

Comprehension of Postmetallization Annealed MOCVD- on Treated III-V Semiconductors

Figure 13

(a) Dielectric constant and (b) effective oxide charges of TiO2/S-GaAs and PMA-TiO2/S-GaAs at different PMA temperatures.
148705.fig.0013a
(a)
148705.fig.0013b
(b)