Research Article
Signal Integrity Analysis in Carbon Nanotube Based Through-Silicon Via
Table 1
Via parasitics associated with different CNT bundled TSVs.
| | Via parasitics | SWCNT bundle | DWCNT bundle | MWCNT bundle | | Shell = 4 | Shell = 8 | Shell = 10 |
| | 5400 | 3825 | 2336 | 1352 | 1148 | | (k) | 3.2024 | 3.2013 | 3.2007 | 3.2004 | 3.2003 | | (/m) | 1.19 | 1.25 | 1.36 | 1.37 | 1.38 | | (pH/m) | 2.99 | 4.23 | 6.93 | 11.97 | 14.09 | | (fF/m) | 521.53 | 369.45 | 225.61 | 130.58 | 110.89 | | (fF/m) | 76.48 | 29.69 | 10.17 | 3.26 | 2.23 | | (fF/m) | 7.71 | 5.07 | 3.17 | 1.93 | 1.64 |
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