A Clue to Understand Environmental Influence on Friction and Wear of Diamond-Like Nanocomposite Thin Film

Table 1

Deposition condition for DLN film.

Bias voltage	Plasma current	Precursor flow rate	Ar flow rate	Magnetic field	RPM of substrate	Working pressure
550 V	0.8 A	0.756 mL/10 mins	50 mL/min	120 Gauss	3	7.5𝐸−5 mbar