A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope

Figure 1

The exploded view of the CDA-101A. Part A, the granite base with the spindle mounted on the 𝑋-stage. Part B, the vertical granite arch with the AFM stage and the 𝑍-stage. Part C, the optical housing with CCD camera and automatic turret mount. Part D, the automatic turret with glide, burnish, scriber, and optical objectives. Read the text for further detailed description.