A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope
Figure 3
The frequency count plot of the -stage position, with a bin size of 0.001 mm, that the -stage must be moved to in order for the target defect to be in the middle of the microscope view. The two peaks correspond to the two highly repeatable positions of 23.332 mm and 23.338 mm due to the two stabilized room temperatures. See text for more detailed description.
