A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope

Figure 4

The illustration of the mechanical loop in the AFM. The mechanical loop in sequence consists of the sample, the sample chuck, the stage, the linear guides, the granite base, the granite arch, the approach stage, the scanner body, and the cantilever tip. Test image for noise floor measurement is shown in the insert. The 𝑧-scale is ±250 pm. The RMS noise is estimated to be 58 pm.