A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope

Figure 8

Test flow illustration, from sample load to AFM image. (a) Load the disk sample to the chuck. (b) Glide defect mapping from glide test. (c) Map of indexed defect from glide defect search. (d) CDA to AFM switch panel. A simple press of the “Auto Scan” button will start the automatic AFM scan routine. (e) Final AFM image of one of the scanned defects.