Online Monitoring of Copper Damascene Electroplating Bath by Voltammetry: Selection of Variables for Multiblock and Hierarchical Chemometric Analysis of Voltammetric Data

Table 4

Individual (range by range) selection of the ranges of points of staircase voltammogram, variables , of Figure 1 determined based on results of Figure 3. The potentials are expressed versus reference electrode.

Data range index, k	Signal	Range of voltammogram, variables	Width,	​; mV	mV
	Reduction	1401–1430	30	−268	−338
	Oxidation	1478–1496	19	142	322
	Reduction	1785–1826	42	−197	−287
	Oxidation	1871–1888	18	162	333
	Reduction	2173–2219	47	−168	−268
	Oxidation	2263–2279	17	172	262
	Reduction	2563–2612	50	−158	−248
	Oxidation	2655–2670	16	182	333
	Reduction	2955–3002	48	−168	−228
	Oxidation	3048–3062	15	202	343
	Reduction	3345–3395	51	−158	−238
	Oxidation	3441-3454	14	222	353
	Reduction	3735–3786	52	−148	−238
	Oxidation	3834–3846	13	242	363