Design and Fabrication of Diffractive Light-Collecting Microoptical Device with 1D and 2D Lamellar Grating Structures
Figure 7
Scanning electron micrograph of the fabricated 1D and 2D DOEs and the depth measured by surface profiler; (a) horizontal 1D DOEs (yellow structures in Figure 2), (b) vertical 1D DOEs (gray structures in Figure 2), (c) 2D DOEs, and (d) the depth of each DOE.
