International Journal of Manufacturing Engineering / 2014 / Article / Fig 7

Research Article

Design and Fabrication of Diffractive Light-Collecting Microoptical Device with 1D and 2D Lamellar Grating Structures

Figure 7

Scanning electron micrograph of the fabricated 1D and 2D DOEs and the depth measured by surface profiler; (a) horizontal 1D DOEs (yellow structures in Figure 2), (b) vertical 1D DOEs (gray structures in Figure 2), (c) 2D DOEs, and (d) the depth of each DOE.
101823.fig.007a
(a)
101823.fig.007b
(b)
101823.fig.007c
(c)
101823.fig.007d
(d)

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