101823.fig.007a
(a)
101823.fig.007b
(b)
101823.fig.007c
(c)
101823.fig.007d
(d)
Figure 7: Scanning electron micrograph of the fabricated 1D and 2D DOEs and the depth measured by surface profiler; (a) horizontal 1D DOEs (yellow structures in Figure 2), (b) vertical 1D DOEs (gray structures in Figure 2), (c) 2D DOEs, and (d) the depth of each DOE.